class 10000無塵室知識摘要
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Cleanroom - Wikipedia, the free encyclopedia
Cleanroom for microelectronics manufacturing with fan filter units installed in the ceiling grid ... So, for example, an ISO class 5 cleanroom has at most 105 particles/m3. Both FS 209E and ... Grade C, 352,000, 2,900, 3,520,000, 29,000. Grade ...